Militaire Industrie

Highly Protective Liquid Slip Rings: The Ideal Rotary Transfer Solution for the Semiconductor Indust

Militaire Industrie2025-07-04

As semiconductor manufacturing processes become more and more sophisticated, the rotary transfer of liquid cooling, chemical solutions and fine fluids within the equipment puts forward higher requirements, and JINPAT has launched the liquid slip ring model LPPL000-02L, which provides a reliable and customized solution for the rotary transfer of liquids in semiconductor equipment by virtue of its compact structure, high level of protection, and long-life performance.

 

Compact design, suitable for high-precision equipment layout

Semiconductor process equipment is generally small, complex structure, LPPL000-02L designed for space-constrained occasions, the shape of the structure of the compact, easy to integrate into the wafer handling equipment, glue development system, wafer cleaner, such as rotating parts, without affecting the overall layout of the equipment.

 

Liquid rotary transmission is more reliable.

LPPL000-02L adopts high sealing liquid slip ring technology, which can realize the continuous and stable transmission of various industrial liquids (including deionized water, coolant, chemical solvents, etc.) in the rotary structure. The internal flow path is scientifically designed to effectively prevent leakage and pressure fluctuation, ensuring the safety and consistency of a high-precision production environment.

 

Third, support for customized interface types to adapt to diverse process requirements

For the semiconductor industry's different fluid media and equipment interface standards, LPPL000-02L can be customized according to customer needs for a variety of interfaces, such as quick-plug fittings, flange-type fittings, threaded interfaces, etc., to meet the compatibility needs of different manufacturers' equipment, to achieve rapid docking, flexible assembly.

 Highly Protective Liquid Slip Rings The Ideal Rotary Transfer Solution for the Semiconductor Industry.jpg

High protection level, adapting to the clean room environment

The product has excellent sealing and protection performance, optional IP65 and above protection level, can operate stably in high cleanliness, high humidity or corrosive environment, to meet the semiconductor production line on the equipment cleanliness and corrosion resistance of the stringent standards.

 

Long-life structure design, reduce maintenance costs

Using wear-resistant materials and precision sealing components, LPPL000-02L has a very high rotational life, can support millions of rotary operations, significantly reducing the frequency of replacement and maintenance costs, and is a key component in continuous mass production to achieve high and stable operation.

 

Application example:

Wafer Washing and Drying Equipment

High speed wafer transfer arms

Chemical-mechanical milling systems (CMP)

Liquid delivery system in a glue development process module

 

The LPPL000-02L liquid slip ring provides professional support for the rotary transfer of liquids in semiconductor equipment due to its compact form, high sealing, high life and strong customization capabilities. It not only improves the operation efficiency and safety level of the whole machine, but also provides key assistance for the development of intelligent and compact high-end equipment.

 

For more models or customized solutions, please contact JINPAT technical team for detailed support.